Subscription Ability of Naphthoquinondiazide Photoresists to Exothermic Decomposition A.N. Shushpanov, A.Ya. Vasin, V.M. Raykova, G.G. Gadzhiev DOI: 10.24000/0409-2961-2020-10-90-96 Year: 2020 Issue num: 10 more